Micro machining with selective etching
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High resolution, all-fiber, micro-machined sensor for simultaneous measurement of refractive index and temperature
This paper presents a highly-sensitive, miniature, all-silica, dual parameter fiber-optic Fabry-Perot sensor, which is suitable for independent measurement of the refractive index and the temperature of the fluid surrounding the sensor. The experimental sensor was…
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In-line short cavity Fabry-Perot strain sensor for quasi distributed measurement utilizing standard OTDR
This paper presents an in-line, short cavity Fabry-Perot fiber optic strain sensor. A short air cavity inside a single-mode fiber is created by the fusion splicing of appropriately micro machined fiber tips. A precise tuning…
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All-fiber, long-active-length Fabry-Perot strain sensor
This paper presents a high-sensitivity, all-silica, all-fiber Fabry- Perot strain-sensor. The proposed sensor provides a long active length, arbitrary length of Fabry-Perot cavity, and low intrinsic temperature sensitivity. The sensor was micro-machined from purposely-developed sensor-forming…
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Miniature all-glass robust pressure sensor
This paper describes a newly designed all-glass miniature (~ 125 µm) fiber-optic pressure sensor design that is appropriate for high-volume manufacturing. The fabrication process is based on the chemical etching of specially-designed silica optical fiber,…